Hollow Beam Electron Gun for Electron Beam Reducing Image Projection System : Computer Simulation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-04-15
著者
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Shimizu Hiroyasu
1st Designing Department Ic Equipment Division Ic & Lcd Equipment Business Headquarters Nikon Co
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Shimizu Hiroyasu
1st Designing Department Ic & Lcd Equipment Division Ohi Plant Nikon Corporation
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Nakasuji Mamoru
1st Designing Department Ic Equipment Division Ic & Lcd Equipment Business Headquarters Nikon Co
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Nakasuji Mamoru
1st Designing Department Ic & Lcd Equipment Division Ohi Plant Nikon Corporation
関連論文
- High-Emittance and Low-Brightness Electron Gun for Reducing-Image Projection System: Computer Simulation
- Hollow Beam Electron Gun for Electron Beam Reducing Image Projection System : Computer Simulation
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- Secondary Electron Detection for Multiple-Channel Scanning Electron Microscope : Computer Simulation
- High-Emittance and Low-Brightness Electron Gun for Reducing-Image Projection System: Computer Simulation