High-Emittance and Low-Brightness Electron Gun for Reducing-Image Projection System: Computer Simulation

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-04-15

著者

• Shimizu Hiroyasu

  1st Designing Department Ic & Lcd Equipment Division Ohi Plant Nikon Corporation

• Nakasuji Mamoru

  1st Designing Department Ic & Lcd Equipment Division Ohi Plant Nikon Corporation

関連論文

• High-Emittance and Low-Brightness Electron Gun for Reducing-Image Projection System: Computer Simulation
• Hollow Beam Electron Gun for Electron Beam Reducing Image Projection System : Computer Simulation
• High Efficiency Secondary Electron Detection for the Electron-Beam-Reducing Projection Lithography System
• Secondary Electron Detection for Multiple-Channel Scanning Electron Microscope : Computer Simulation
• High-Emittance and Low-Brightness Electron Gun for Reducing-Image Projection System: Computer Simulation

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