Secondary Electron Detection for Multiple-Channel Scanning Electron Microscope : Computer Simulation

概要

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A new scanning electron microscope (SEM) which consists of multiple beam probes, a secondary electron (SE) selector, multiple channel SE detectors and monitors is studied. For this system the throughput is improved channel-number that of the conventional SEM. The SE selector consists of a hemispherical shell with multiple holes and a positive potential. Because of a diverging lens effect due to the potential formed inside the spherical shell, the SEs emitted from different positions go to different holes. Around the holes there is a converging lens effect, and the SEs are collected into the holes and detected by the SE detectors behind the holes. All the SEs for which the emission angle is smaller than 80°, the initial energy is smaller than 2 eV and which have an emitting position variation in the range width smaller than 0.5 mm are collected by the SE detector.
社団法人応用物理学会の論文
1999-03-15