New Photosensitive Polyimide System for Sealing High-Density Semiconductor Chip : Atoms, Molecules, and chemical physics
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-10-15
著者
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Takeuchi K
Riken (the Institute Of Physical And Chemical Research)
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Tajima Y
Riken (the Institute Of Physical And Chemical Research)
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Takeuchi K
Greduate School Of Science And Engineering Saitama University:riken (the Institute Of Physical And C
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SHIGEMITSU Yasuo
Nanomaterial Processing Laboratory, RIKEN
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TAJIMA Yusuke
Nanomaterial Processing Laboratory, RIKEN
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TAKEUCHI Kazuo
Nanomaterial Processing Laboratory, RIKEN
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TAKEUCHI Etsu
Nanomaterial Processing Lab., RIKEN (The Institute of Physical and Chemical Research)
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Takeuchi E
Nanomaterial Processing Lab. Riken (the Institute Of Physical And Chemical Research)
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Teraishi Kazuo
Department Of Materials And Chemistry Graduate School Of Engineering Tohoku University
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Shigemitsu Y
Riken (the Institute Of Physical And Chemical Research)
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Takeuchi Etsu
Nanomaterial Processing Lab. Riken (the Institute Of Physical And Chemical Research)
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