Structural Analysis on Photocatalytic Efficiency of TiO_2 by Chemical Vapor Deposition(Structure and Mechanical and Thermal Properties of Condensed Matter)

概要

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Structural analysis of anatase TiO_2 films on window glass by chemical vapor deposition (CVD) was performed. Relationships between preferred orientation and photocatalytic activity of polycrystalline TiO_2 films were investigated. Photocatalytic activity was affected by crystalline orientation that depended on the deposition temperature. <112>-oriented TiO_2 films were obtained at 360℃, while <001>-oriented films were obtained at other temperatures. Photocatalytic activity of the <112>-oriented film was greater than that of the <001>-oriented film. The film with <112>-preferred orientation exhibited a columnar structure resulting in a larger surface area for photocatalytic reaction than the films with <001>-preferred orientation. Also, the film with <112>-preferred orientation exhibited a facet consisting of s-faces {100} which showed the larger surface energy theoretically. It is clear that fabrication of the thin film TiO_2 by CVD should be controlled to exhibit the <112>-preferred orientation for the optimum photocatalytic efficiency.
社団法人応用物理学会の論文
2002-01-15