Coloration of Tungsten Oxide Films Induced by Ion or Electron Irradiation
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概要
- 論文の詳細を見る
The coloration of tungsten oxide films induced by energetic ions or electrons has been investigated. According to the simultaneous observation of the AES spectra and the film transmittance, it was found that this coloration phenomenon is mainly based on the extraction of oxygen atoms from the film.
- 社団法人応用物理学会の論文
- 1981-05-05
著者
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Miura Tadao
Electron Device Engineering Lab. Toshiba Co. Ltd.
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MORITA Hiroshi
Electron Device Eng. Lab. Toshiba Corp.
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WASHIDA Hiroshi
Electron Device Eng.Lab. Toshiba Corp.
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Washida Hiroshi
Electron Device Engineering Laboratory Toshiba Corporation
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