Uniformity of Magnetic Properties in Amorphous Thin Films
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概要
- 論文の詳細を見る
Rare earth transition metal amorphous magnetic thin films with a uniaxial magnetic anisotropy normal to the film plane may be used in memory devices in the future. The magnetic properties are required to be uniform for such an application. This paper describes experimental results on the uniformity of Gd-Fe thin films prepared by various deposition methods and proposes a new deposition method, electron beam deposition through a specially-shaped window onto a revolving substrate. Use of a revolving substrate produces uniformity of the magnetic properties in amorphous thin films, but has direct effects upon the internal structure of such films.
- 社団法人応用物理学会の論文
- 1981-02-05
著者
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Sakurai Yoshifumi
Department Of Control Engineering Faculty Of Engineering Science Osaka University
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OHBUCHI Yutaka
Department of Control Engineering, Faculty of Engineering Science, Osaka University
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Araki Yasunori
Department Of Control Engineering Faculty Of Engineering Science Osaka University
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Ohbuchi Yutaka
Department Of Control Engineering Faculty Of Engineering Science Osaka University
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Sakurai Yoshifumi
Department Of 2nd Surg. Niigata City Hospital
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