Variation of Liquid and Solid Compositions during LPE Growth from a Ternary Component Solution

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概要

• 論文の詳細を見る

• A generalized calculation is presented to predict the variation of liquid and solid compositions during the liquid phase epitaxial growth from a ternary component solution under an equilibrium condition. Basic equations describing the fractional changes of liquid components are derived for the continuous process. Starting at a given initial condition the calculation based on an iterative procedure is carried out along on the theoretical liquidus surface with no adjustable parameters. The theory is applied to the growth of Ga_<1-x>Al_xAs as an example, resulting in good agreement with the experimental data.

• 社団法人応用物理学会の論文
• 1979-08-05

著者

• Teramoto Iwao

  Research Laboratory Matsushita Electronics Corp.

• KAZUMURA Masaru

  Research Laboratory, Matsushita Electronics Corporation

• YAMANAKA Haruyoshi

  Research Laboratory, Matsushita Electronics Corporation

• Kazumura Masaru

  Research Laboratory Matsushita Electronics Corporation

• Yamanaka Haruyoshi

  Research Laboratory Matsushita Electronics Corporation

関連論文

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• Solid Solubility of Amphoteric Silicon in Gallium Arsenide

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