Auger Electron Spectroscopy in Au Particles Deposited on Air-Cleaved Face (001) of MgO Crystal

概要

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Auger signals from Au particles deposited on MgO held at 150℃ in 10^8 Torr, were measured with the aid of a 4-gird LEED system, and compared with the fractional area occupied by Au particles Z. The height of the Auger signals can be expressed approximately by αZ^n for Z>10%, where η equals unity and α lies between 1 and 2, depending on the direction of the observed position. The observed height includes an error of ±9%, which is probably caused by the variation of the steep background due to secondary electrons at the time of observing the Auger signals. It is pointed out that Auger electron spectroscopy is a powerful means for the estimation of fractional areas of less than a few %, if the background curve is estimated accurately.
社団法人応用物理学会の論文
1979-01-05