A New Technique for the Formation of Ultrafine Particles by Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
A gas evaporation technique using sputtering is newly developed. The characteristic of this new technique is the use of sputtering in an atmosphere of higher gas pressure such as 0.5 to 100 Torr than is used for ordinary sputtering. W, Ag and Cu are tested and their ultrafine particles are formed. WC_<1-x> particles are also prepared by reactive sputtering.
- 社団法人応用物理学会の論文
- 1986-01-20
著者
-
Yatsuya Shigeki
Department Of Applied Physics Faculty Of Engineering Nagoya University
-
Yatsuya Shigeki
Department Of Applied Physics Nagoya University:(present Address)3m E. & I. T. Sector Extention
-
Mihama Kazuhiro
Department Of Applied Physics Faculty Of Engineering Nagoya University
-
Mihama Kazuhiro
Department Of Applied Physics Nagoya University
-
Yamauchi Kenji
Department Of Applied Physics Faculty Of Engineering Nagoya University
-
Yamauchi Kenji
Department Of Applied Physics Nagoya University
-
KAMAKURA Takanobu
Department of Applied Physics, Nagoya University
-
Kamakura Takanobu
Department Of Applied Physics Nagoya University
関連論文
- Pressure Dependence of Direct Band Gap at Γ Point in Solids
- Magnetic Properties of Extremely Fine Particles of Iron Prepared by Vacuum Evaporation on Running Oil Substrate
- Formation of Ultrafine Metal Particles by Gas-Evaporation : VI. Bcc Metals, Fe, V, Nb, Ta, Cr, Mo and W
- Multiply-Twinned Particles of Germanium("Formation of Ultrafine Praticls by Gas-Evaporation Technique.V")
- Formation of Ultrafine Particles by Gas-Evaporation Technique. : V.Silicon and Germanium in Argon
- Image Segmentation Using HIS Color Space and Considering Pixel Block Properties
- Inhibition of Liver Metastasis from Orthotopically Implanted Colon Cancer in Nude Mice by Transfection of the TIMP-1 Gene into KM12SM Cells
- Observation of Extremely Fine Gold Crystallites Grown on Molybdenite Films by High Resolution Electron Microscopy
- A New Technique for the Preparation of Extremely Fine Metal Particles
- Mean Size and Size Distribution of Metal Fine Particles Produced by Gas Evaporation Technique
- Formation of Ultrafine Metal Particles by Gas-Evaporation Technique. : IV. Crystal Habits of Iron and Fcc Metals, Al, Co, Ni, Cu, Pd, Ag, In, Au and Pb
- Formation of Ultrafine Metal Particles by Gas-Evaporation Technique. III. : AN in He, Ar and Xe, and Mg in Mixtures of Inactive Gas and Air
- BeO Supporting Films for High Resolution Electron Microscopy
- Study on Fragmentation of Ionized Atom-Clusters by Time-of-Flight Mass Spectrometry
- Formation of Lead Clusters in Supersonic Nozzle Expansion: Effect of Nozzle Geometry
- Binary Compound Clusters Formed by Free Jet Expansion
- Formation and Ionization Potentials of Lead Clusters
- Electron Microscopy of Composite Films of Titanium and Magnesium Oxide
- Formation of Ti Hydride Ultrafine Particles and Transformation between TiH_2 and Ti
- High Resolution Electron Microscopy of Composite Films of Iron and Magnesium Oxide
- High Resolution Electron Microscopy of Composite Films of Gold and Magnesium Oxide
- Absorption and Release of Carbon Dioxide with Various Metal Oxides and Hydroxides
- Ferromagnetic Domains in F.C.C. Cobalt Fine Particles Observed by Lorentz Electron Microscopy
- Magnesium Twinned Particles Grown in Inert Gases
- A New Technique for the Formation of Ultrafine Particles by Sputtering
- Effect of Truncation of the Size Distribution of Extremely Fine Metal Particles
- Initial Stage of Epitaxial Growth of Evaporated Gold Films on Sodium Chloride
- Characterization of Ultra Fine Palladium Particles with the Mean Size of 20 A by X-Ray Diffraction
- Electron Microscopic Observation of PbS Islands
- Detection of Strain in InP/InGaP Superlattices by Dark-Field Electron Microscopy and Nano-Diffraction Technique
- The Fffects of Ion Bombardment on Molybdenite
- Ultrafine Metal Particles Formed by Gas-Evaporation Technique. : II. Crystal Habits of Magnesium, Manganese, Beryllium and Tellurium
- Formation of Ultrafine Metal Particles by Gas Evaporation Technique. I. Aluminium in Helium
- Observation of Lattice Images for θ' Precipitates in Al-4% Cu Alloys
- Growth and Structure of AuCu II Particles
- Formation of Quasicrystalline Aluminium-Vanadium and Aluminium-Chromium Fine Particles by Gas-Evaporation Technique
- Fine Particles of Titanium Prepared by Gas Evaporation
- Endoscopic Removal with Clipping for Colonic Lipomas.