Diamond Film Gas Sensors for Leak Detection of Semiconductor Doping Gases

概要

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Gas sensors for leak detection of toxic semiconductor doping gases such as PH_3, B_2H_6, and AsH_3 were fabricated using diamond films. The sensors have a double-layered structure composed of undoped and B-doped polycrystalline diamond layers with Pt electrodes. The relative changes in the resistance of the sensors were typically 10-20% for 0.2ppm PH_3 in air, and the highest value was over 100%. It was concluded that the diamond film gas sensors fabricated in the present work would be practically applicable as compact solid-state sensors with an advantage over the conventional aqueous electrolyte sensors.
社団法人応用物理学会の論文
2000-01-15