Diamond Sensors Durable for Continuously Monitoring Intense Vacuum Ultraviolet Radiation
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概要
- 論文の詳細を見る
Photoconducting sensors are fabricated using radiation-hard diamond films to measure the intensity of vacuum ultraviolet (VUV) radiation. They are composed of a pair of interdigitated Pt electrodes on highly oriented diamond surfaces. The sensors are examined as monitors of the intensity of VUV radiation ($\lambda=172$ nm) from xenon excimer lamps with an output power of greater than 10 mW/cm2. It was demonstrated that the diamond sensors have practical durability: the output signals from the sensors are reproducible and stable under a continuous irradiation from the xenon lamps for more than 500 h.
- 2005-10-15
著者
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Tachibana Takeshi
Kobe Steel Ltd. Electronics Research Laboratory
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Ishihara Hideaki
Iwasaki Electric Co. Ltd. Corporate Advanced Technology Center
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UCHIDA Koji
Iwasaki Electric Co., Ltd., R&D Center
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Nippashi Kenji
Iwasaki Electric Co. Ltd. R&d Center
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Hayashi Kazushi
Kobe Steel Ltd. Electronics Research Laboratory
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Yokota Yoshihiro
Kobe Steel Ltd. Electronics Research Laboratory
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Matsuoka Mikihiko
Iwasaki Electric Co. Ltd. Corporate Advanced Technology Center
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Matsuoka Mikihiko
Iwasaki Electric Co., Ltd., R&D Center, 1-20 Fujimi-cho, Gyoda, Saitama 361-0021, Japan
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Kawakami Nobuyuki
Kobe Steel, Ltd., Electronics Research Laboratory, 1-5-5 Takatsuka-dai, Nishi-ku, Kobe 651-2271, Japan
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Kobashi Koji
Kobe Steel, Ltd., Electronics Research Laboratory, 1-5-5 Takatsuka-dai, Nishi-ku, Kobe 651-2271, Japan
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Ishihara Hideaki
Iwasaki Electric Co., Ltd., R&D Center, 1-20 Fujimi-cho, Gyoda, Saitama 361-0021, Japan
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Yokota Yoshihiro
Kobe Steel, Ltd., Electronics Research Laboratory, 1-5-5 Takatsuka-dai, Nishi-ku, Kobe 651-2271, Japan
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Nippashi Kenji
Iwasaki Electric Co., Ltd., R&D Center, 1-20 Fujimi-cho, Gyoda, Saitama 361-0021, Japan
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Uchida Koji
Iwasaki Electric Co., Ltd., R&D Center, 1-20 Fujimi-cho, Gyoda, Saitama 361-0021, Japan
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UCHIDA Koji
Iwasaki Electric Co., Ltd., R&D Center
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Tachibana Takeshi
Kobe Steel, Ltd., Electronics Research Laboratory, 1-5-5 Takatsuka-dai, Nishi-ku, Kobe 651-2271, Japan
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Hayashi Kazushi
Kobe Steel, Ltd., Electronics Research Laboratory, 1-5-5 Takatsuka-dai, Nishi-ku, Kobe 651-2271, Japan
関連論文
- Measurement of Vacuum Ultraviolet Radiation with Diamond Photo Sensors
- Diamond Sensors Durable for Continuously Monitoring Intense Vacuum Ultraviolet Radiation
- Diamond Film Gas Sensors for Leak Detection of Semiconductor Doping Gases
- Measurement of Vacuum Ultraviolet Radiation of Low-Pressure Mercury Lamps Using Photoconductors Made of Synthetic Diamond Films
- Application of Microwave Photoconductivity Decay Method to Characterization of Amorphous In-Ga-Zn-O Films
- Direct Measurement of 185 nm Radiation from Low-Pressure Mercury Lamps Using Diamond-Based Vacuum Ultraviolet Sensors
- Application of Microwave Photoconductivity Decay Method to Characterization of Amorphous In-Ga-Zn-O Films