Application of Microwave Photoconductivity Decay Method to Characterization of Amorphous In-Ga-Zn-O Films

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概要

• 論文の詳細を見る
• 2012-11-01

著者

• Sumie Shingo

  Kobelco Research Institute

• Hayashi Kazushi

  Kobe Steel Ltd. Electronics Research Laboratory

• Kugimiya Toshihiro

  Kobe Steel Ltd.

• Morita Shinya

  Kobe Steel Ltd.

• KUGIMIYA Toshihiro

  KOBE STEEL, LTD.

• HINO Aya

  KOBE STEEL, LTD.

• YASUNO Satoshi

  Kobelco Research Institute, Inc.

• KITA Takashi

  Kobe University

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• Application of Microwave Photoconductivity Decay Method to Characterization of Amorphous In-Ga-Zn-O Films

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