UV Pulsed Laser Annealing of Si^+ Implanted Silicon Film and Low-Temperature Super-Thin Film Transistors

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1989-02-20

著者

• Morita Yasushi

  Research And Development Dept. Semiconductor Group Sony

• NOGUCHI Takashi

  Research and Development Dept., Semiconductor Group, SONY

• Noguchi Takashi

  Research And Development Dept. Semiconductor Group Sony

関連論文

• UV Pulsed Laser Annealing of Si^+ Implanted Silicon Film and Low-Temperature Super-Thin Film Transistors
• Correlation between Types of Junction and Submillimeter-Wave Responses in Point-Contact Josephson Junctions
• Frequency Dependence of the ac Josephson Effect in Nb Point Contacts in the Submillimeter-Wave Region
• Tunneling-Type Temperature Dependence of Critical Current in Nb-Sn Point Contact
• Effect of the Shunt Capacitance on the ac Josephson Effect in Nb Point Contacts
• Peak Shifts ot the Photo-Induced Magnetophonon Resonance in n-InSb at 4.2 K
• Solid Phase Grain Growth and Electronic Properties of Si+-Implanted Glow-Discherged a-Si:H Thin Films

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