One Approach to Joining Plasma and Sheath
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概要
- 論文の詳細を見る
This letter treats the problem of joining plasma and sheath transverse to the discharge axis. The balance equations of plasma are solved from the center of the plasma to the wall. The point joining plasma and sheath is decided so that the sheath equation becomes non-negative. It is thought that the results of this letter will be useful in the analysis of the probe diagnostics, plasma processing, etc.
- 社団法人応用物理学会の論文
- 1989-12-20
著者
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Ohuchi Mikio
Department Of Electronic Engineering Faculty Of Engineering Tokyo Denki University
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Kubota Tadahiro
Department Of Electronic Engineering Faculty Of Engineering Tokyo Denki University
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Kaneda Teruo
Department Of Bioengineering Yatsushiro National College Of Technology
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Ohsawa Atsushi
Department Of Analytical Chemistry Meiji College Of Pharmacy
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Ohsawa Atsushi
Department Of Electronic Engineering Faculty Of Engineering Tokyo Denki University
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YAMADA Shinjiro
Department of Electronic Engineering, Faculty of Engineering, Tokyo Denki University
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Yamada Shinjiro
Department Of Electronic Engineering Faculty Of Engineering Tokyo Denki University
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