Elimination of Spherical Aberration in Grazing-Incidence Optics with Cylindrical Mirrors
スポンサーリンク
概要
- 論文の詳細を見る
The design of an optics system consisting of four cylindrical mirrors is described. Two symmetrically installed cylindrical mirrors reduce spherical aberration. This set of cylindrical mirrors can focus vertically or horizontally. Astigmatism is also eliminated by using a second set of mirrors. The spot size of this optics system is estimated to be about 2 μm.
- 社団法人応用物理学会の論文
- 1996-10-15
著者
-
Goto Yoshinori
Ntt Basic Research Laboratories
-
UESUGI Naoshi
NTT Basic Research Laboratories
-
KANEKO Takashi
NTT LSI Laboratories
-
Uesugi N
Ntt Basic Res. Lab. Kanagawa Jpn
関連論文
- Simultaneous Measurement of Absorption and X-Ray Emission from Preformed Plasma Generated by Ultrashort Prepulse
- Photon Stimulated Desorption of CO from Si Single Crystal
- Mirror Design and Alignment for X-Ray Lithography Beamlines
- A Beamline and Its Components for SR Lithography : Lithography Technology
- Computer Simulation of Ultra-Short Optical Pulse Propagation in Solid and Hollow Wave-Guides
- Elimination of Spherical Aberration in Grazing-Incidence Optics with Cylindrical Mirrors
- 27p-YQ-12 Near two-photon-resonance self-pulse compression in atomic Xenon
- Femtosecond Free Induction Decay Beats in Nd^:YAG Crystal
- A Beamline and Its Components for SR Lithography