Minute Strain Fields due to Vacancy Type Defects in a Rapidly Cooled Czochralski-Grown Silicon Crystal
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概要
- 論文の詳細を見る
The spatial fluctuations of lattice strain in regularly grown and in rapidly cooled Czochralski-grown silicon (CZ Si) wafers were measured by means of plane-wave X-ray topography using highly collimated X-rays with an angular divergence of less than 0.01". By comparison with the spatial fluctuations of the interstitial oxygen (O_i) concentration measured by means of micro-Fourier transform infrared spectroscopy, we found that the lattice strain of the rapidly cooled wafer was smaller than the strain attributed solely to O_i atoms. This result gave the first clear evidence for the existence of vacancy-type defects in as-grown, rapidly cooled CZ Si crystals.
- 社団法人応用物理学会の論文
- 1993-08-01
著者
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Ishikawa Tetsuya
Department Of Applied Physics Faculty Of Engineering University Of Tokyo
-
Ono Haruhiko
Microelectronics Research Laboratories Nec Corporation
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Ikarashi Taeko
Microelectronics Research Laboratories Nec Corporation
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KIMURA Shigeru
Microelectronics Research Laboratories, NEC Corporation
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Kimura Shigeru
Microelectronics Research Laboratories Nec Corporation
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Ishikawa Tetsuya
Department Of Applied Physics University Of Tokyo
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Ishikawa Tetsuya
Department Of Applied Chemistry Faculty Of Science Science University Of Tokyo
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