The Effects of Active Oxygen Atoms in Y-Ba-Cu-O Sputtering
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概要
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The role of active oxygen atoms in the as-grown fabrication of Y-Ba-Cu-O superconducting thin films on a MgO single-crystal substrate was investigated. By producing different active oxygen concentrations at the substrate using the UV-ozone technique, we found that the role of active oxygen atoms is not only to promote oxidation but also to lower the film growth temperature. As a result, as-grown superconducting Y-Ba-Cu-O thin films were fabricated at the film growth temperature of above 500℃ by the UV-ozone technique with reactive ac sputtering.
- 社団法人応用物理学会の論文
- 1990-05-20
著者
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Okabe Y
Univ. Tokyo Tokyo Jpn
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Matsubara G
Univ. Tokyo Tokyo
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Okabe Yoichi
Department Of Electronic Engineering Faculty Of Engineering University Of Tokyo
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MATSUBARA Gensoh
Department of Electronic Engineering, Faculty of Engineering, The University of Tokyo
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Okabe Yoichi
Department Of Electrical And Electronics Engineering University Of Tokyo
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