Calculation of Substitutional Impurity Distribution by Dissociative Mechanism
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概要
- 論文の詳細を見る
The basic equations for the dissociative mechanism of diffusion are a set of non-linear differential equations. Sturge obtained an approximate linear differential equation for the substitutional impurity distribution and solved it approximately (Proc. Phys. Soc. 73 (1959) 297). In this paper, Sturge's equation is solved numerically and the result is compared with his approximate solution. It is found that the approximate solution agrees fairly well with the numerical solution.
- 社団法人応用物理学会の論文
- 1982-10-20
著者
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Yoshida Masayuki
Department Of Biochemistry And Integrative Medical Biology School Of Medicine Keio University
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Yoshida Masayuki
Department Of Electrical Engineering Fukuoka Institute Of Technology
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Morooka Masami
Department Of Electrical Engineering Fukuoka Institute Of Technology
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Yoshida Masayuki
Department Of Applied Genetics Medical Research Institute Tokyo Medical And Dental University
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