Plasma Diagnostics of CH_4/O_2/H_2 Electron Cyclotron Resonance Plasma with Permanent Magnets and Deposition of Amorphous Carbon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-15
著者
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Yoshikawa T
Division Of Mechanical Engineering Department Of Mechanical Science And Bioengineering Graduate Scho
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TAHARA Hirokazu
Division of Mechanical Engineering, Department of Mechanical Science and Bioengineering, Graduate Sc
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YOSHIKAWA Takao
Division of Mechanical Engineering, Department of Mechanical Science and Bioengineering, Graduate Sc
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Yasui Toshiaki
Division of Mechanical Science, Department of Systems and Human Science, Graduate School of Engineer
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Kodera Hidekazu
Division of Mechanical Science, Department of Systems and Human Science, Graduate School of Engineer
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Oya Izumi
Division of Mechanical Science, Department of Systems and Human Science, Graduate School of Engineer
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Oya Izumi
Division Of Mechanical Science Department Of Systems And Human Science Graduate School Of Engineerin
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Kodera Hidekazu
Division Of Mechanical Science Department Of Systems And Human Science Graduate School Of Engineerin
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