Breakdown Characteristics of RF Argon Capacitive Discharge

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概要

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• Measured breakdown characteristics of a capacitively coupled rf argon discharge at 13.56 MHz are compared with breakdown criterion derived from the electron balance model in which the difference between the longitudinal and transverse electron diffusion coefficients is taken into account. For the right-hand branch of the minimum of V-shaped breakdown voltage curves, good agreement between the observed and predicted criteria is found in the case of short electrode separations when the electron formation rate is calculated in terms of the time-averaged ionization frequency.

• 社団法人応用物理学会の論文
• 1997-09-15

著者

• Sato Masumi

  Department Of Electrical And Information Engineering Yamagata University

• Sato Masumi

  Department Of Bioscience Tokyo University Of Agriculture

• SHOJI Masafumi

  Department of Electrical and Information Engineering, Yamagata University

• Shoji Masafumi

  Department Of Electrical And Information Engineering Yamagata University

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