Discharge Positive Column with Elliptical Cross Section
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概要
- 論文の詳細を見る
Analytical solutions are given for plasma parameters in the positive column with elliptical cross section in the high-pressure Schottky limit. The plasma density profile is described by a product of even radial and periodic Mathieu functions which can be expanded in terms of even Bessel functions. The plasma balance equation is derived from the boundary condition of zero plasma density at the elliptical tube wall and the electron temperature is calculated as functions of tube size and gas pressure. The solution for the elliptical positive column is shown to be a generalization of the circular positive column theory.
- 社団法人応用物理学会の論文
- 1995-08-15
著者
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SATO Masumi
Department of Pharmacology, Toho University School of Pharmaceutical Sciences
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Sato Masumi
Department Of Electrical And Information Engineering Yamagata University
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