Modelling of Noble Gas-SiH_4 Gas Mixture Glow Discharge Positive Column Plasmas (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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CHANG Jen-Shih
Department of Engineering Physics, McMaster University
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Hobson Robert
Department Of Physics York University
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Berezin A
Mcmaster Univ.
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KIKUCHI Mitsuru
Department of Nuclear Engineering, Faculty of Engineering, The University of Tokyo
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Kikuchi Mitsuru
Department Of Engineering Physics Mcmaster University:department Of Electrical Engineering Musashi I
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Kikuchi Mitsuru
Department Of Clinical Laboratory Toride Kyodo General Hospital
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Chang Jen-shih
Department Of Electrical Engineering Musashi Institute Of Technology
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TEII Shinriki
Department of Electrical Engineering, Musashi Institute of Technology
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BEREZIN Alexander
Department of Engineering Physics, McMaster University
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MATSUMURA Shosaku
Department of Engineering Physics, McMaster University
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Teii Shinriki
Department Of Electrical And Electronics Engineering Musashi Institute Of Technology
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Matsumura Shosaku
Department Of Electrical And Electronic Engineering Musashi Institute Of Technology
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Matsumura Shosaku
Department Of Engineering Physics Mcmaster University:department Of Electrical Engineering Musashi I
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Kikuchi Mitsuru
Department of Biophysical Genetics, Graduate School of Medicine, Kanazawa University
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