Epitaxially Grown Aluminum Film on 36°-Rotated Y-Cut Lithium Tantalate for High-Power Surface Acoustic Wave Devices
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概要
- 論文の詳細を見る
Epitaxially grown Al film was obtained on 36°-rotated Y-cut LiTaO_3 substrate by an IBS system. The epitaxial relation was (111)<101>Al⫽(012)<100>LiTaO_3. The Al film had very high resistance to stress migration. In SAW filters, time to failure caused by stress migration was improved by more than 100 times over an ordinary polycrystalline Al-Cu film.
- 社団法人応用物理学会の論文
- 1994-05-30
著者
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SAKURAI Atsushi
Murata Mfg. Co., Ltd.
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Ieki H
Murata Manufacturing Co. Ltd. Kyoto Jpn
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Ieki Hideharu
Murata Manufacturing Co. Ltd.
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YOSHINO Yukio
Murata Manufacturing Co., Ltd.
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Yoshino Y
Murata Manufacturing Co. Ltd.
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Yoshino Yukio
Murata Manufacturing Co. Ltd
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Sakurai Atsushi
Murata Manufacturing Co. Ltd.
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IEKI Hideharu
Murata Manufacturing Co., Ltd.
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