Durability of Quartz Mold and Failure Mode Analysis in Imprint Lithography

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概要

• 論文の詳細を見る
• 2007-09-19

著者

• Yoshino Yukio

  Murata Manufacturing Co. Ltd

• Kanagawa Tetsuya

  Murata Manufacturing Co. Ltd

• OOE Hideaki

  Murata Manufacturing Co., LTD

• HAGI Toshio

  Murata Manufacturing Co., LTD

• Hagi Toshio

  Murata Manufacturing Co. Ltd

• Ooe Hideaki

  Murata Manufacturing Co. Ltd

関連論文

• Epitaxially Grown Aluminum Film on 36°-Rotated Y-Cut Lithium Tantalate for High-Power Surface Acoustic Wave Devices
• Durability of Quartz Mold and Failure Mode Analysis in Imprint Lithography

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