Epitaxially Grown Aluminum Film on Rotated Y-Cut Lithium Niobate for High-Power Surface Acoustic Wave Devices

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概要

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• Epitaxially grown aluminum (Al) films for high-power surface acoustic wave (SAW) devices were formed in various orientations on rotated Y-cut lithium niobate (LiNbO_3) substrates by using the dual-ion-beam sputtering (DIBS) method. The (111) plane of every Al film on LiNbO_3 is parallel to its surface in our experiments.

• 社団法人応用物理学会の論文
• 1995-05-30

著者

• Sakurai Atsushi

  Murata Manufacturing Co. Ltd.

• Sakurai Atsushi

  Murata Martufacturing Co. Ltd.

• Nakanishi Hidefumi

  Murata Martufacturing Co., Ltd.

• Yosino Yukio

  Murata Martufacturing Co., Ltd.

• Yosino Yukio

  Murata Martufacturing Co. Ltd.

• Nakanishi Hidefumi

  Murata Martufacturing Co. Ltd.

関連論文

• SAW Resonators Using Epitaxially Grown Al Electrodes : SAW and Communication Devices
• Epitaxially Grown Al Electrodes for High-Power Surface Acoustic Wave Devices
• Preparation and Characterization of Epitaxial Lead Zirconate Titanate Films on Pt/MgO Substrates by Metalorganic Chemical Vapor Deposition
• Preparation and Characterization of Epitaxial Lead Zirconate Titanate Films on Pt/(Ti, Al)N/TiN/Si Substrates by Metalorganic Chemical Vapor Deposition
• Epitaxially Grown Aluminum Film on 36°-Rotated Y-Cut Lithium Tantalate for High-Power Surface Acoustic Wave Devices
• Epitaxially Grown Aluminum Film on Rotated Y-Cut Lithium Niobate for High-Power Surface Acoustic Wave Devices

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