Nickel/Vanadium and Nickel/Titanium Multilayers for X-Ray Optics
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概要
- 論文の詳細を見る
Ni/V and Ni/Ti multilayers with 3-10 nm layer periods and 8 or 32 layer pairs were deposited with rf sputtering, and examined by X-ray diffraction and transmission electron microscopy(TEM). The increase of X-ray diffraction peak numbers proved that the sharper interfaces were formed under lower Ar pressure, and the estimated interfacial roughness for multilayers deposited at 2.1 Pa was 0.55 nm. The microcrystalline structure was observed by TEM in the Ni layer, and seemed to dominate the residual interfacial roughness.
- 社団法人応用物理学会の論文
- 1990-06-20
著者
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Nagata H
Department Of Obstetrics And Gynecology Niigata University School Of Medicine
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Nagata Hiroshi
Yoshida Nano Mechanism Project J. R. D. C. Nikon Co.:(present Address)research Laboratory Nikon Corp
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Nagata Hiroshi
Yoshida Nano Mechanism Project J. R. D. C. Nikon Co.:(present Address)nikon Co.
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