A Dry Process for Stripping As^+ Ion-Implanted Photoresist
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概要
- 論文の詳細を見る
A dry single-wafer process for the stripping of As^+ ion-implanted photoresists has been developed. The process utilizes a combination of reactive ion etching (RIE) and remote microwave plasma chemical processing. The implanted arsenic is removed through conversion to a volatile compound after removal of the organic matrix.
- 社団法人応用物理学会の論文
- 1992-06-30
著者
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Kikuchi Makoto
Department Of Applied Physics Faculty Of Technology Tohoku Gakuin University
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Kikuchi M
Nippon Chemical Industrial Co. Ltd. Tokyo Jpn
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KIKUCHI Masashi
ULVAC Japan, Ltd.
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BERSIN Richard
ULVAC Japan, Ltd.
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Bersin Richard
Ulvac Japan Ltd.
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