Deuterated Impurities Monitored by Microwave Spectroscopy during Glow Discharge Cleaning
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概要
- 論文の詳細を見る
Microwave spectroscopy was applied to monitoring of deuterated impurities produced by glow discharge cleaning (GDC). This method estimated the change in the quantity of the isotopic impurities by observing a rotational spectrum of water, HDO. For verifying the validity of the method, mass spectral behaviors of several light impurities (HDO, D_2, H_2O, HD, D_2 and H_2) were studied simultaneously. The deuterated species decreased with time at their own diminishing rates, while normal water, H_2O, showed no decrease during GDC. The rotational spectrum of HDO stood at the frequency of 22.3077 GHz. It was distant enough from the nearest neighbor (about 70 MHz) so that the observed line was identified definitely. The lowest partial pressure detected with a microwave spectrometer was 7X10^<-5> Pa.
- 社団法人応用物理学会の論文
- 1992-03-15
著者
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MIYAHARA Akira
Institute of Plasma Physics of Nagoya University
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KUBOTA Yusuke
National Institute for Fusion Science
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FUNATO Yasuyuki
Suzuka College of Technology
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Mushiaki M
Department Of Physics Kawasaki Medical School
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Mushiaki Motoi
Department Of Physics Kawasaki Medical School
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Funato Yasuyuki
Department Of Nuclear Engineering Faculty Of Engineering Tohoku University
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Kubota Y
Kanazawa Inst. Technol. Ishikawa Jpn
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Miyahara A
Teikyo University
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Funato Y
Suzuka National Coll. Technol. Suzuka Jpn
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MIYAHARA Akira
National Institute for Fusion Science
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Kubota Yuichi
Department Of Physics The University Of Tokyo
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