Effect of Glow Discharge Cleaning for Fast Pump-down of an Unbaked Vacuum Chamber
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概要
- 論文の詳細を見る
- 1998-03-20
著者
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MOTOJIMA Osamu
National Insitute for Fusion Science
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KUBOTA Yusuke
National Institute for Fusion Science
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Motojima Osamu
National Institute For Fusion Science
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Motojima O
National Inst. Fusion Sci. Toki Jpn
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AKAISHI Kenya
National Institute for Fusion Science
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EZAKI Kazuhiro
National Institute for Fusion Science
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