Study of Applicability of AC Photovoltaic Method and Photoconductive Decay Method Using Microwaves as Noncontact Methods for Bulk Lifetime Measurement

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Study of Applicability of AC Photovoltaic Method and Photoconductive Decay Method Using Microwaves as Noncontact Methods for Bulk Lifetime Measurement
Medium Field Breakdown Origin on Metal Oxide Semiconductor Capacitor Containing Grown-in Czochralski Silicon Crystal Defects
Medium Field Breakdown Following Local Tunneling Current on MOS Capacitor Containing Grown-in CZ Crystal Defects
High-sensitivity Defect Evaluation by a New Preferential Etching Technique for Highly As-doped Si Crystals
短波長励起室温フォトルミネッセンス法及び表面電荷分析法によるシリコンエピタキシャル層ライフタイム品質の評価〔英文〕

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