Lithographic Performance Enhancement Using Dummy Diffraction Mask

スポンサーリンク

概要

著者

関連論文

Origin of (111) Twin Lamellae in BaTiO_3 Thin Films on Platinum Substrates
Ninety Degree Domains in RF-Sputtered BaTiO_3 Thin Films on Platinum Substrates
(111) Twins in BaTiO_3 Thin Films Deposited by RF Magnetron Sputtering
Negative Pattern Generation Technique by Laser Beam Writing for Integrated Optics
Lithographic Performance Enhancement Using Dummy Diffraction Mask
Noise Performance of Pseudomorphic AlGaAs/InGaAs/GaAs High Electron Mobility Transistors with Wide Head T-Shaped Gate Recessed by Electron Cyclotron Resonance Plasma Etching
Extremely Low Noise 0.15μm T-Gate AlGaAs/InGaAs Pseudomorphic HEMTs
Effects of Electron Beam Damage on the Electrical Characteristics of n-type Metal-Oxide-Semiconductor Field-Effect-Transistors
Crystallization of Amorphous Silicon by Excimer Laser Annealing with a Line Shape Beam Having a Gaussian Profile
Injection Locking of a Modified-Unstable-Resonator XeCl Laser by Using a Line-Narrowed Hemiconfocal Oscillator
High Stability Resonator for Pulsed Solid State Lasers
Simple Modification of Positive-Branch Unstable Resonator for Diffraction-Limited XeCl Laser Beam
Comparison of Propagation Losses of Single-Mode GaAs/AlGaAs Waveguides in a Three- and a Five-Layer Structure
Degradation of Performance due to Photoinduced Index Change in a Ti:LiNbO_3 Two-Mode Interference Wavelength Division Multi/Demultiplexer
Effect of Degree of Coherence in Optical Lithography Using Dummy Diffraction Mask
Energy Level Structure of Amorphous Silicon Carbide
Infrared-Cut Filter : Optics and Quantum Electronics
Experimental Evaluation of Arrayed Microcolumns with Monolithic Structure
Branching Angle Tuning of a Multi Step Ion-Exchanged Two-Mode-Interference Wavelength-Dvision Multi/Demultiplexer in Glass
Fabrication of RF-Sputtered Y-Ba-Cu-O-Ag Composite Thin Films
Effect of Degree of Coherence in Optical Lithography Using Dummy Diffraction Mask

もっと見る

スポンサーリンク