Effects of Electron Beam Damage on the Electrical Characteristics of n-type Metal-Oxide-Semiconductor Field-Effect-Transistors

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概要

• 論文の詳細を見る
• 1994-03-15

著者

• Park Sin-chong

  Electronics And Telecommunications Research Institute

• Chun Soung

  Korea Advanced Institute Of Science & Technology

• JEON Young

  Electronics and Telecommunications Research Institute

関連論文

• Lithographic Performance Enhancement Using Dummy Diffraction Mask
• Effects of Electron Beam Damage on the Electrical Characteristics of n-type Metal-Oxide-Semiconductor Field-Effect-Transistors

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