Effect of Degree of Coherence in Optical Lithography Using Dummy Diffraction Mask
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概要
- 論文の詳細を見る
- 1996-02-01
著者
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Yoo Hyung
Electronics And Telecommunications Research Institute
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Oh Yong
Electronics And Telecommunications Research Institute
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Chung Hai
Electronics And Telecommunications Research Institute
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YIM Donggyu
Department of Physics Education, Seoul National University
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LEE Seonbok
Department of Physics Education, Seoul National University
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LEE Sungmuk
Department of Physics Education, Seoul National University
関連論文
- Lithographic Performance Enhancement Using Dummy Diffraction Mask
- Effect of Degree of Coherence in Optical Lithography Using Dummy Diffraction Mask
- Effect of Degree of Coherence in Optical Lithography Using Dummy Diffraction Mask