Silicon Nitride Film for High-Mobility Thin-Film Transistor by Hybrid-Excitation Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 1993-01-30
著者
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Yamamoto S
Univ. Tsukuba Ibaraki Jpn
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Yamamoto S
Japan Atomic Energy Research Institute
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MIGITAKA Masatoshi
Department of Information and Control, Toyota Technological Institute
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Migitaka Masatoshi
Department Of Information And Control Engineering Toyota Technological Institute
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YAMAMOTO Shigeichi
Department of Information and Control Engineering, Toyota Technological Institute
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Yamamoto Shigeichi
Department Of Information And Control Engineering Toyota Technological Institute
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