The Determination of rms Roughness and Correlation Length of Rough Surface by Measuring Spatial Coherence Function

概要

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The rms roughness and correlation length are determined by measuring the degree of coherence for a fluctuating laser beam transmitted from a moving rough surface illuminated by a diverging beam. The determination is made by using the theoretical formula derived on the assumption that the rough surface is a phase filter. In case of the adequately small spread of the illumination beam and optically smooth roughness, the measured variations of the degree of coherence are in good agreement with the theoretical calculation, and the rms roughness and correlation length of ground glasses can be evaluated. The experimental results support the assumption that the statistics of the surface irregularities is characterized by the Gaussian distribution and correlation functions. The limitations on the dimensions of two diffracting apertures and on the beam spread are demonstrated and discussed.
社団法人応用物理学会の論文
1973-11-05