Some Features of an Electron Cyclotron Resonance Plasma Produced by Means of a Lisitano-Coil
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概要
- 論文の詳細を見る
Characteristics of an ECR plasma produced by means of an L-coil are studied in changing the location of exact ECR condition on the coil. It can be seen that the energy distribution function for ions changes from double-humped to Maxwellian, and the quiescent plasma is obtained. Ion compositions of the plasma are measured as a function of electron temperature, and the chemical reactions in the plasma are discussed.
- 社団法人応用物理学会の論文
- 1972-05-05
著者
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Okamoto Yukio
Department Of Electrical And Electronic Engineering Faculty Of Engineering And Bio-nano Electronics
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Tamagawa Hajime
Department Of Nuclear Engineering Nagoya University
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Okamoto Yukio
Department Of Applied Physics Nagoya University
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