Energy Dispersion of Positive Ions Effused from an RF Plasma
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概要
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Ion extraction model for plasma-sheath system from an RF plasma and its equivalent circuit are presented. A qualitative explanation of the energy anomalies is discussed. The energy dispersion of ions under the assumption that the ion velocity is modulated by a time variation of plasma potential, is calculated; that is in good agreement with experiments.
- 社団法人日本物理学会の論文
- 1970-07-05
著者
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Okamoto Yukio
Department Of Electrical And Electronic Engineering Faculty Of Engineering And Bio-nano Electronics
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Tamagawa Hajime
Department Of Nuclear Engineering Nagoya University
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Okamoto Yukio
Department Of Applied Physics Nagoya University
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