Characteristics of Pulsed Surface Wave Oxygen Plasma Generated by Ring-Slot Antenna
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概要
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Time-resolved probe and optical emission measurements were performed in the pulse modulated microwave oxygen plasma that was produced using a ring-slot antenna for surface wave mode. Microwave power (2.45 GHz, ˜1 kW max.) was modulated with a square wave pulse of 100 μs period and 20˜90 % duty ratio. Spatiotemporal evolution of an electron energy distribution function was obtained and the optical emission actinometry was used as a means for estimating relative concentrations of radicals in the plasma. These characteristics were compared with those of the continuously driven (CW) plasma.
- 社団法人 電気学会の論文
- 2007-09-01
著者
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Okamoto Tetsu
Development Section Technology & Engineering Department Nsh-business Unit Ushio Inc.
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OKAMOTO Yukio
Department of Nuclear Engineering, Faculty of Engineering, Nagoya University
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Okamoto Yukio
Department Of Electronics & Communications Engineering Faculty Of Engineering Toyo University
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Okamoto Yukio
Department Of Electrical And Electronic Engineering Faculty Of Engineering And Bio-nano Electronics
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Okamoto Yukio
Department Of Applied Physics Nagoya University
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Okamoto Tetsu
Development Section, Technology & Engineering Department NSH-Business Unit, Ushio Inc.
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Okamoto Yukio
Department of Electronics & Communications Engineering, Faculty of Engineering, Toyo University
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