Correction Devisors for the Four-Point Probe Resistivity Measurement on Parallelepiped Semiconductors
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概要
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By use of the Green's function method, the expressions of the correction devisors for the equally spaced and linearly arrayed four-point probes on the centerline of a parallelepiped semiconductor are derived under the various boundary conditions.The numerical results of correction devisors are given in figures.
- 社団法人応用物理学会の論文
- 1972-05-05
著者
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Murashima Sadayuki
Department Of Electrical Engineering Kyoto Technical University
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Ishibashi Fumio
Department Of Electrical Engineering Fukui Institute Of Technology
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Ishibashi Fumio
Department Of Electrical Engineering Aichi Institute Of Technology
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