Analyses of Some Potential Problems in Cylindrical Coordinates in Connection with Four-Point Probe Technique
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概要
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By the use of Green's function method, the expressions for the correction devisors are presented for the four point probe resistivity measurement of the semiconductor plate bounded vertically by a cylindrical surface under various boundary conditions. The cases of both linear and square probes are discussed. Some special cases are compared with the results already reported. In terms of numerical analysis, the two kinds of problems treated here are typical examples which are to be analyzed by use of the expressions of the r- and ψ-forms, respectively.
- 社団法人応用物理学会の論文
- 1973-08-05
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