大面積薄膜形成用小型シート状プラズマ源

概要

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An electron cyclotron resonance (ECR) plasma source is developed to create broad thin-films. Instead of generating two-dimensionally uniform large plasma, one-dimensionally uniform sheet plasma is generated in the plasma source. Substrates will be scrolled in the sheet plasma to achieve the purpose. This plasma source consists of two permanent magnets and a slotted waveguide (slot antenna) . The magnets face their poles oppositely each other to generate a cusp field in the chamber and the slot antenna is set between magnets. A uniform oxygen plasma is obtained when a short plunger terminates the antenna. According to the results of probe measurement, spatial non-uniformity of density is less than 9% in 20cm length. When the dummy load terminates the antenna, the density tends to rise in the down stream of the traveling microwave. It is confirmed that the plasma is rich in O_2 molecular ions by visible-range spectroscopy.
社団法人プラズマ・核融合学会の論文
1996-05-25