チタンとシリカの密着界面に対するオージェ分析の適用性 : 金属-セラミックス界面近傍における化学結合状態の変遷(第一報)

概要

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The valence Auger spectra have been studied in order to understand interatomic chemical bonding across the interface between metals and ceramics. SiO_2 was adopted as the ceramic and Ti was used as the metal. Ti/Si interface was also analized to comprehend the characteristic features of Si-O, Ti-O and Ti-Si bond in spectra. Ti was deposited on SiO_2 and Si substrates under high vacuum environment about 5×10^<-4> Pa. Ti/SiO_2 was annealed at 473K for 1800s. Ti/Si was annealed at 823K for 3600s. Some of the spectral feature observed on the Ti/Si interface were applicable to understand the chemical bonding at the Ti/SiO_2 interface. The Ti-O bond was detectable at the interface by the intensity ratio of Ti-LM_<23>M_<45>/Ti-LM_<23>M_<23>. The Si-O bond was also detectable from the energy of Si-LVV peaks. It was found to be difficult to comfirm the existence of Ti-Si bonds at the Ti/SiO_2 interface. A damage induced by Ar- and electron-bombardment was observed. It didn't disturb the detection of Ti-O and Si-O bonds.
社団法人溶接学会の論文
1991-11-05