A High-Efficiency Waveguide Photodiode for 40-Gb/s Optical Receivers (Joint Special Issue on Recent Progress in Optoelectronics and Communications)

概要

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Waveguide photodiodes (WGPDs) are key devices for high-speed optical receivers in trunk lines because of their potential ability to provide both high efficiency and a high-speed response. We have designed a waveguide photodiode for 40-Gb/s-range optical receivers. The optical coupling characteristics were simulated in detail to optimize the waveguide structure, and the electrodes of the photodiode were designed to form a coplanar transmission line to match the system impedance, which minimized frequency-response degradation. A highly beryllium-doped, low-temperature-grown InGaAs contact layer grown by gas source molecular beam epitaxy was used to reduce the series resistance, and approximately 40% reduction of series resistance was achieved. The fabricated device exhibited both a very high external quantum efficiency of 81% for 1.55-μm light and a sufficient bandwidth of more than 40GHz. Though we used a simple conventional fabrication process, excellent characteristics were achieved due to the optimized optical design and well suppressed parasitic parameters.
社団法人電子情報通信学会の論文
1999-08-25