二次イオン質量分析法による窒化アルミニウム焼結体の酸素二次イオン像の観察(<特集>表面・界面・薄膜と分析化学)

概要

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It is important to know the effects of such factors as crystal orientation, sample topography and matrix effect on the quality of ion image data. In this study, the secondary ion image of O^- obtained from a sintered AIN sample was analyzed in order to evaluate the oxygen distribution in the grains and along the grain boundaries. The O^- -ion image showed a similar contrast to that of the Al^- -ion image, mainly due to a difference in the crystallographical orientation of each grain and the sample topography. Data concerning the O^- -ion image was processed by normalizing the oxygen-ion intensity with that of aluminium, and then subtracting the background level, in order to eliminate any contribution from the adsorbed residual gas. Based on the interpretation of the obtained data, the usefulness and limitation of these data processing methods are discussed.
社団法人日本分析化学会の論文
1991-11-05