マイクロポール盤の設計及び製作

概要

論文の詳細を見る
Sizes of what we call general purpose drilling machines might be as big as human being's ones, and they are almost 1 to 2 meters in height. In case of making holes into thin films on the top of small semiconductor's base plates, otherwise in case of picking up small sample from big size specimen to be inspected, these current big machines are not convenient and not efficient in operation any more. Then, we have developed two different types of small drilling machines ; the one is the machine constructed by monolithic parallel spring consisting of hinge mechanisms and its size reaches as small as 50mm in width, 60mm in depth and 100mm in height, and the other is the machine to which the tube scanner is applied and its size does as small as 35mm in width, 55mm in depth and 125mm in height. We report that 400μm holes in diameter has been manufactured by the monolithic parallel spring consisting of hinge mechanism drilling machine and the alphabetic character "T" in the square of 10μm×10m has been done by the tube scanner drilling machine.
社団法人日本時計学会の論文
2002-06-10