多次元レーザによる精密測定

概要

論文の詳細を見る
We present a new technique applying a multi dimensional interferometer to measure pitching and yawing motion of both a precision straightness testing machine and the kinematic mounting device. Secondly we apply this method for the calibration of this straightness testing machine using the sequential two points method by which we can separate that testing machine's own error and the reference specimen error itself. Thirdly we try to discuss about the Abbe's error concerning this testing machine. We have got these results. 1. each Pitching and Yawing motion of the precision straightness testing machine are 280nm and 120nm, 2. 70mm diameter mirror's form error is 80nm and 280mm long ground and super finished prism mirror's form error is 300nm. 3. Kinematic mounting stability effected by temperature changes is much lower than the 3-points supporting method's one applyng the roundness testing machine.
社団法人日本時計学会の論文
2003-03-10