マイクロマシン技術を用いた高耐圧マイクロポンプの開発

概要

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A novel micropump that has two active and normally-closed valves was developed using micromachine technology. This micropump can pump in forward and backward direction, and hold the fluid without consuming energy even when the fluid source has some pressure. These normally-closed valves are manufactured by filling up silicone rubber paste after bonding a glass substrate and a silicon substrate. Silicone rubber works as a"gate"for shutting off the flow. Therefore, high pressure-resistance micropump is realized with no influence of fabrication error. In this paper, basic characteristics of this micropump about flow rate, outlet pressure and pressure-resistance are described.
社団法人日本時計学会の論文
2000-09-10