Magnetic properties and frequency characteristics of (CoFeB)_X-(SiO_1.9)_1-X and CoFeB films for RF application
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概要
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(CoFeB)-(SiO_1.9) and CoFeB films were fabricated by synchronous triple RF magnetron sputtering with rotating a cylindrical electrode. Three types films for RF application in the range over 1GHz were obtained, and these permeability characteristics and micro-structures were investigated. The as-deposited films exhibited large anisotropy field H_k in the range from 40 to 550 Oe, and exhibited high ferromagnetic resonance (FMR) frequencies of 1.6 - 6.0 GHz in permeability characterisrtics. The films exhibited amorphous like or hetero-amorphous structures, which led to good soft magnetic properties with electrical resistivity p of 100 - 100,000 μΩcm and saturation magnetization 4πM_s of 6.5-20 kG. It was found that the obtained larger H_k was effective to attain the higher frequency characteristics with the lower losses for RF inductor cores.
- 2002-12-01
著者
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Shimada Y
Department Of Japanese Oriental Medicine Faculty Of Medicine Toyama Medical And Pharmaceutical Unive
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SHIMADA Yutaka
Faculty of Medicine, Toyama Medical and Pharmaceutical University
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Arai Ken-Ichi
Research Institute of Electrical Communication, Tohoku Univ.
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SHIMADA Yutaka
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
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Munakata Makoto
Sojo Univ., Energy Electronics Laboratory, Sojo Univ.
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Namikawa Masashi
Sojo Univ., Energy Electronics Laboratory, Sojo Univ.
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Motoyama Mashio
Delta Works
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Yagi Masaaki
Sojo Univ., Energy Electronics Laboratory, Sojo Univ.
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Yamaguchi Masahiro
Research Institute of Electrical Communication, Tohoku Univ.
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Shimada Yutaka
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Arai Ken-ichi
Reseach Institute Of Electrical Communication Tohoku University
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Yamaguchi Masahiro
Research Center For Nuclear Physics Osaka University:science Research Center Hosei University
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Shimada Yutaka
Institute For Agricultural Research Tohoku University
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Shimada Yutaka
The 21st Century Coe Program Toyama Medical And Pharmaceutical University:department Of Japanese Ori
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Shimada Yutaka
富山医科薬科大学医学部和漢診療学教室
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Shimada Yutaka
Department Of Japanese Oriental Medicine Faculty Of Medicine Toyama Medical And Pharmaceutical Unive
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