Electrical Resistivity and GHz Permeability of (CoFeB)-(SiO_<1.9>) Hetero-Amorphous Granular Films
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概要
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Soft magnetic (Co_<35.6>Fe_<50>B_<14.4>)-(SiO_<1.9>) films with electrical resistivity of over 10,000 μΩcm (1×10^<-4> Ωm) and hetero-amorphous glanular structure were fabricated on glass substrates by using synchronous triple-rf magnetron sputtering. The film thickness effects on the eddy current loss in the range of 1"3 GHz were investigated with magnetic properties and high frequency permeabilities. The films in the thickness of 0.4-4.2 μm exhibited large uniaxal anisotropy field of 360-400 Oe and low hard axis coercivity of 0.3-1.0 Oe and high resonance frequency of 5-6 GHz. It was confirmed that eddy current loss in the films was practically negligible because of the resistivity over 10,000 μΩcm. (Co_<35.6>Fe_<50>B_<14.4>)-(SiO_<1.9>) hetero-amorphous granular film is one of good candidates for core application in the GHz range.
著者
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Shimada Y
Department Of Japanese Oriental Medicine Faculty Of Medicine Toyama Medical And Pharmaceutical Unive
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SHIMADA Yutaka
Faculty of Medicine, Toyama Medical and Pharmaceutical University
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Shimada Yutaka
The 21st Century Coe Program Toyama Medical And Pharmaceutical University:department Of Japanese Ori
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Shimada Yutaka
富山医科薬科大学医学部和漢診療学教室
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Shimada Yutaka
Department Of Japanese Oriental Medicine Faculty Of Medicine Toyama Medical And Pharmaceutical Unive
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